Inventor
PANCHAM IAN A
US8 patents
Patents
8 patentsUS7341633B2Mar 11, 2008
Apparatus for electroless deposition
APPLIED MATERIALS INC230 citations98
US7205233B2Apr 17, 2007
Method for forming CoWRe alloys by electroless deposition
APPLIED MATERIALS INC21 citations92
US7223308B2May 29, 2007
Apparatus to improve wafer temperature uniformity for face-up wet processing
APPLIED MATERIALS INC20 citations91
US7534298B2May 19, 2009
Apparatus and method of detecting the electroless deposition endpoint
APPLIED MATERIALS INC10 citations84
US7654221B2Feb 2, 2010
Apparatus for electroless deposition of metals onto semiconductor substrates
APPLIED MATERIALS INC18 citations83
US7827930B2Nov 9, 2010
Apparatus for electroless deposition of metals onto semiconductor substrates
APPLIED MATERIALS INC17 citations82
US7311779B2Dec 25, 2007
Heating apparatus to heat wafers using water and plate with turbolators
APPLIED MATERIALS INC9 citations72
US7323058B2Jan 29, 2008
Apparatus for electroless deposition of metals onto semiconductor substrates
APPLIED MATERIALS INC4 citations60