Inventor

VERBURGT THOMAS

US6 patents

⚠️ This page may combine multiple inventors who share the name “VERBURGT THOMAS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

AUGUST TECHNOLOGY CORP

3 patents

US6324298B1Nov 27, 2001

Automated wafer defect inspection system and a process of performing such inspection

AUGUST TECHNOLOGY CORP310 citations97

US6937753B1Aug 30, 2005

Automated wafer defect inspection system and a process of performing such inspection

AUGUST TECHNOLOGY CORP96 citations96

US6826298B1Nov 30, 2004

Automated wafer defect inspection system and a process of performing such inspection

AUGUST TECHNOLOGY CORP53 citations94

RUDOLPH TECHNOLOGIES INC

1 patent

US7729528B2Jun 1, 2010

Automated wafer defect inspection system and a process of performing such inspection

RUDOLPH TECHNOLOGIES INC43 citations94

RUDOLPH TECH INC

1 patent

US9464992B2Oct 11, 2016

Automated wafer defect inspection system and a process of performing such inspection

RUDOLPH TECH INC6 citations81

O'DELL JEFFREY L

1 patent

US9337071B2May 10, 2016

Automated wafer defect inspection system and a process of performing such inspection

O'DELL JEFFREY L1 citations54