Inventor
HARLESS MARK
US13 patents
⚠️ This page may combine multiple inventors who share the name “HARLESS MARK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
RUDOLPH TECHNOLOGIES INC
6 patentsUS7729528B2Jun 1, 2010
Automated wafer defect inspection system and a process of performing such inspection
RUDOLPH TECHNOLOGIES INC43 citations94
US7340087B2Mar 4, 2008
Edge inspection
RUDOLPH TECHNOLOGIES INC14 citations81
US7196300B2Mar 27, 2007
Dynamic focusing method and apparatus
RUDOLPH TECHNOLOGIES INC9 citations70
US7822260B2Oct 26, 2010
Edge inspection
RUDOLPH TECHNOLOGIES INC5 citations60
US7703823B2Apr 27, 2010
Wafer holding mechanism
RUDOLPH TECHNOLOGIES INC5 citations60
US7629993B2Dec 8, 2009
Automated wafer defect inspection system using backside illumination
RUDOLPH TECHNOLOGIES INC3 citations55
AUGUST TECHNOLOGY CORP
3 patentsUS6324298B1Nov 27, 2001
Automated wafer defect inspection system and a process of performing such inspection
AUGUST TECHNOLOGY CORP310 citations97
US6937753B1Aug 30, 2005
Automated wafer defect inspection system and a process of performing such inspection
AUGUST TECHNOLOGY CORP96 citations96
US6826298B1Nov 30, 2004
Automated wafer defect inspection system and a process of performing such inspection
AUGUST TECHNOLOGY CORP53 citations94