Inventor

EGLEY FRED D

US4 patents

⚠️ This page may combine multiple inventors who share the name “EGLEY FRED D”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LAM RES CORP

2 patents

US7811409B2Oct 12, 2010

Bare aluminum baffles for resist stripping chambers

LAM RES CORP6 citations71

US8859432B2Oct 14, 2014

Bare aluminum baffles for resist stripping chambers

LAM RES CORP0 citations50

EGLEY FRED D

1 patent

US8313635B2Nov 20, 2012

Bare aluminum baffles for resist stripping chambers

EGLEY FRED D9 citations77

RASNICK JOHN W

1 patent

US8992722B2Mar 31, 2015

Direct drive arrangement to control confinement rings positioning and methods thereof

RASNICK JOHN W0 citations20