Inventor

KANG MICHAEL S

US5 patents

⚠️ This page may combine multiple inventors who share the name “KANG MICHAEL S”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LAM RES CORP

2 patents

US7811409B2Oct 12, 2010

Bare aluminum baffles for resist stripping chambers

LAM RES CORP6 citations71

US8859432B2Oct 14, 2014

Bare aluminum baffles for resist stripping chambers

LAM RES CORP0 citations50

EGLEY FRED D

1 patent

US8313635B2Nov 20, 2012

Bare aluminum baffles for resist stripping chambers

EGLEY FRED D9 citations77

KANG MICHAEL S

1 patent

US8845856B2Sep 30, 2014

Edge ring assembly for plasma etching chambers

KANG MICHAEL S3 citations51

SHARPLESS LEONARD J

1 patent

US9613834B2Apr 4, 2017

Replaceable upper chamber section of plasma processing apparatus

SHARPLESS LEONARD J0 citations36