Inventor
CHEN ANTHONY L
US7 patents
⚠️ This page may combine multiple inventors who share the name “CHEN ANTHONY L”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
5 patentsUS6344151B1Feb 5, 2002
Gas purge protection of sensors and windows in a gas phase processing reactor
LAM RES CORP30 citations92
US6074516AJun 13, 2000
High sputter, etch resistant window for plasma processing chambers
LAM RES CORP30 citations92
US6071375AJun 6, 2000
Gas purge protection of sensors and windows in a gas phase processing reactor
LAM RES CORP26 citations92
US7811409B2Oct 12, 2010
Bare aluminum baffles for resist stripping chambers
LAM RES CORP6 citations71
US8859432B2Oct 14, 2014
Bare aluminum baffles for resist stripping chambers
LAM RES CORP0 citations50