Inventor
MOREL BRUNO
US10 patents
⚠️ This page may combine multiple inventors who share the name “MOREL BRUNO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
7 patentsUS7052553B1May 30, 2006
Wet cleaning of electrostatic chucks
LAM RES CORP174 citations97
US6433484B1Aug 13, 2002
Wafer area pressure control
LAM RES CORP47 citations92
US6490536B1Dec 3, 2002
Integrated load simulator
LAM RES CORP12 citations73
US6937915B1Aug 30, 2005
Apparatus and methods for detecting transitions of wafer surface properties in chemical mechanical polishing for process status and control
LAM RES CORP11 citations72
US6925348B2Aug 2, 2005
Methods for detecting transitions of wafer surface properties in chemical mechanical polishing for process status and control
LAM RES CORP9 citations72
US7811409B2Oct 12, 2010
Bare aluminum baffles for resist stripping chambers
LAM RES CORP6 citations71
US8859432B2Oct 14, 2014
Bare aluminum baffles for resist stripping chambers
LAM RES CORP0 citations50