Inventor
DANG HOWARD
US3 patents
Patents
3 patentsUS7892445B1Feb 22, 2011
Wafer electrical discharge control using argon free dechucking gas
LAM RES CORP23 citations90
US7226852B1Jun 5, 2007
Preventing damage to low-k materials during resist stripping
LAM RES CORP13 citations82
US7385287B2Jun 10, 2008
Preventing damage to low-k materials during resist stripping
LAM RES CORP1 citations50