Inventor
SIRARD STEPHEN
US3 patents
Patents
3 patentsUS7892445B1Feb 22, 2011
Wafer electrical discharge control using argon free dechucking gas
LAM RES CORP23 citations90
US9466511B2Oct 11, 2016
Systems and methods for drying high aspect ratio structures without collapse using stimuli-responsive sacrificial bracing material
LAM RES CORP3 citations66
US10008396B2Jun 26, 2018
Method for collapse-free drying of high aspect ratio structures
LAM RES CORP0 citations35