P

Inventor

UHLEMANN STEPHAN

DE20 patents
⚠️ This page may combine multiple inventors who share the name “UHLEMANN STEPHAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CEOS GMBH

6 patents
US6770878B2Aug 3, 2004

Electron/ion gun for electron or ion beams with high monochromasy or high current density

CEOS GMBH44 citations92
US6797962B1Sep 28, 2004

Electrostatic corrector for eliminating the chromatic aberration of particle lenses

CEOS GMBH10 citations68
US7745783B2Jun 29, 2010

Monochromator and radiation source with monochromator

CEOS GMBH4 citations62
US6995378B2Feb 7, 2006

Lens array with a laterally movable optical axis for corpuscular rays

CEOS GMBH2 citations56
US6836372B2Dec 28, 2004

Electrostatic corrector

CEOS GMBH3 citations56
US8362442B2Jan 29, 2013

Corrector

CEOS GMBH0 citations41

ZEISS CARL MICROSCOPY GMBH

3 patents
US9224576B2Dec 29, 2015

Particle-optical systems and arrangements and particle-optical components for such systems and arrangements

ZEISS CARL MICROSCOPY GMBH18 citations92
US10504681B2Dec 10, 2019

Particle-optical systems and arrangements and particle-optical components for such systems and arrangements

ZEISS CARL MICROSCOPY GMBH3 citations84
US9673024B2Jun 6, 2017

Particle-optical systems and arrangements and particle-optical components for such systems and arrangements

ZEISS CARL MICROSCOPY GMBH9 citations84

KNIPPELMEYER RAINER

2 patents
US8097847B2Jan 17, 2012

Particle-optical systems and arrangements and particle-optical components for such systems and arrangements

KNIPPELMEYER RAINER16 citations91
US8637834B2Jan 28, 2014

Particle-optical systems and arrangements and particle-optical components for such systems and arrangements

KNIPPELMEYER RAINER17 citations90

(unassigned)

2 patents
US6646267B1Nov 11, 2003

Method for eliminating first, second and third-order axial image deformations during correction of the third-order spherical aberration in electron optical systems

24 citations91
US6605810B1Aug 12, 2003

Device for correcting third-order spherical aberration in a lens, especially the objective lens of an electronic microscope

42 citations91

UHLEMANN STEPHAN

2 patents
US7800074B2Sep 21, 2010

Electron-optical corrector for an aplanatic imaging system

UHLEMANN STEPHAN2 citations60
US7800076B2Sep 21, 2010

Electron-optical corrector for aplanatic imaging systems

UHLEMANN STEPHAN3 citations60

ZEISS STIFTUNG

1 patent
US5449914ASep 12, 1995

Imaging electron energy filter

ZEISS STIFTUNG53 citations96

CARL ZEISS SMT A G

1 patent
US7554094B2Jun 30, 2009

Particle-optical systems and arrangements and particle-optical components for such systems and arrangements

CARL ZEISS SMT A G29 citations94

ZEISS CARL NTS GMBH

1 patent
US7135677B2Nov 14, 2006

Beam guiding arrangement, imaging method, electron microscopy system and electron lithography system

ZEISS CARL NTS GMBH11 citations82

ZEISS CARL SMT AG

1 patent
US6903337B2Jun 7, 2005

Examining system for the particle-optical imaging of an object, deflector for charged particles as well as method for the operation of the same

ZEISS CARL SMT AG15 citations82

CEOS CORRECTED ELECTRON OPTICAL SYSTEMS GMBH

1 patent
US11081313B2Aug 3, 2021

Particle-optical corrector which is free from axial aberrations of sixth order and electron microscope with corrector

CEOS CORRECTED ELECTRON OPTICAL SYSTEMS GMBH2 citations66