Inventor
KIENZLE OLIVER
DE19 patents
⚠️ This page may combine multiple inventors who share the name “KIENZLE OLIVER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ZEISS CARL NTS GMBH
5 patentsUS6967328B2Nov 22, 2005
Method for the electron-microscopic observation of a semiconductor arrangement and apparatus therefor
ZEISS CARL NTS GMBH18 citations84
US6946657B2Sep 20, 2005
Electron microscopy system
ZEISS CARL NTS GMBH13 citations84
US6878936B2Apr 12, 2005
Applications operating with beams of charged particles
ZEISS CARL NTS GMBH17 citations84
US7135677B2Nov 14, 2006
Beam guiding arrangement, imaging method, electron microscopy system and electron lithography system
ZEISS CARL NTS GMBH11 citations82
US6914249B2Jul 5, 2005
Particle-optical apparatus, electron microscopy system and electron lithography system
ZEISS CARL NTS GMBH9 citations73
ZEISS CARL SMT AG
4 patentsUS6903337B2Jun 7, 2005
Examining system for the particle-optical imaging of an object, deflector for charged particles as well as method for the operation of the same
ZEISS CARL SMT AG15 citations82
US6642525B2Nov 4, 2003
Particle-optical component and system comprising a particle-optical component
ZEISS CARL SMT AG18 citations79
US6756599B2Jun 29, 2004
Particle-optical apparatus, illumination apparatus and projection system as well as a method employing the same
ZEISS CARL SMT AG6 citations62
US7015487B2Mar 21, 2006
Apparatus and method for exposing a radiation sensitive layer by means of charged particles as well as a mask for this purpose
ZEISS CARL SMT AG0 citations33
ZEISS CARL MICROSCOPY GMBH
3 patentsUS9224576B2Dec 29, 2015
Particle-optical systems and arrangements and particle-optical components for such systems and arrangements
ZEISS CARL MICROSCOPY GMBH18 citations92
US10504681B2Dec 10, 2019
Particle-optical systems and arrangements and particle-optical components for such systems and arrangements
ZEISS CARL MICROSCOPY GMBH3 citations84
US9673024B2Jun 6, 2017
Particle-optical systems and arrangements and particle-optical components for such systems and arrangements
ZEISS CARL MICROSCOPY GMBH9 citations84
KNIPPELMEYER RAINER
2 patentsUS8097847B2Jan 17, 2012
Particle-optical systems and arrangements and particle-optical components for such systems and arrangements
KNIPPELMEYER RAINER16 citations91
US8637834B2Jan 28, 2014
Particle-optical systems and arrangements and particle-optical components for such systems and arrangements
KNIPPELMEYER RAINER17 citations90