Inventor
KANEKIYO TADAMITSU
JP22 patents
⚠️ This page may combine multiple inventors who share the name “KANEKIYO TADAMITSU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI HIGH TECH CORP
11 patentsUS6586887B1Jul 1, 2003
High-frequency power supply apparatus for plasma generation apparatus
HITACHI HIGH TECH CORP28 citations88
US9038567B2May 26, 2015
Plasma processing apparatus
HITACHI HIGH TECH CORP5 citations84
US8632637B2Jan 21, 2014
Method and apparatus for plasma processing
HITACHI HIGH TECH CORP6 citations84
US7833429B2Nov 16, 2010
Plasma processing method
HITACHI HIGH TECH CORP7 citations74
US7740739B2Jun 22, 2010
Plasma processing apparatus and method
HITACHI HIGH TECH CORP5 citations74
US6914207B2Jul 5, 2005
Plasma processing method
HITACHI HIGH TECH CORP6 citations58
US11456183B2Sep 27, 2022
Plasma processing method and plasma ashing apparatus
HITACHI HIGH TECH CORP0 citations52
US8366870B2Feb 5, 2013
Method and apparatus for plasma processing
HITACHI HIGH TECH CORP0 citations52
US7435687B2Oct 14, 2008
Plasma processing method and plasma processing device
HITACHI HIGH TECH CORP0 citations52
US7658815B2Feb 9, 2010
Plasma processing apparatus capable of controlling plasma emission intensity
HITACHI HIGH TECH CORP0 citations42
US7947189B2May 24, 2011
Vacuum processing apparatus and vacuum processing method of sample
HITACHI HIGH TECH CORP0 citations41
HITACHI LTD
4 patentsUS7662232B2Feb 16, 2010
Plasma processing apparatus
HITACHI LTD14 citations92
US5961850AOct 5, 1999
Plasma processing method and apparatus
HITACHI LTD41 citations92
US5320707AJun 14, 1994
Dry etching method
HITACHI LTD27 citations92
US6156663ADec 5, 2000
Method and apparatus for plasma processing
HITACHI LTD16 citations82