Inventor

WONGSENAKHUM PANYA

US22 patents

⚠️ This page may combine multiple inventors who share the name “WONGSENAKHUM PANYA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

WONGSENAKHUM PANYA

NOVELLUS SYSTEMS INC

Methods for growing low-resistivity tungsten film

Reducing silicon attack and improving resistivity of tungsten nitride film

Methods for growing low-resistivity tungsten film

Method for reducing tungsten film roughness and improving step coverage

Methods for improving uniformity and resistivity of thin tungsten films

Method of forming low-resistivity tungsten interconnects

Hybrid impedance matching for inductively coupled plasma system

LAM RES CORP

Heater design solutions for chemical delivery systems

Azimuthal mixer

Sublimation control using downstream pressure sensing

Apparatus for purging semiconductor process chamber slit valve opening

Apparatus for purging semiconductor process chamber slit valve opening

Vapor accumulator for corrosive gases with purging

Gas inlet valve with incompatible materials isolation

CVC PRODUCTS INC

Apparatus for supporting a substrate in a reaction chamber

Method and system for dispensing process gas for fabricating a device on a substrate

Apparatus for dispensing gas for fabricating substrates

Method for fabricating a device on a substrate

System for fabricating a device on a substrate with a process gas

GAO JUWEN

Methods for improving uniformity and resistivity of thin tungsten films

THOMAS GEORGE

Hybrid impedance matching for inductively coupled plasma system

WONGSENAKHUM PANYA

Methods and apparatus for cleaning deposition reactors