Inventor

NAGAIAH PADMAJA

US2 patents

Patents

2 patents

US9209258B2Dec 8, 2015

Depositing an etch stop layer before a dummy cap layer to improve gate performance

GLOBALFOUNDRIES INC0 citations46

US10020383B2Jul 10, 2018

Preserving the seed layer on STI edge and improving the epitaxial growth

GLOBALFOUNDRIES INC1 citations42