Inventor
MOORE ROBERT B
US31 patents
⚠️ This page may combine multiple inventors who share the name “MOORE ROBERT B”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
17 patentsUS10203604B2Feb 12, 2019
Method and apparatus for post exposure processing of photoresist wafers
APPLIED MATERIALS INC16 citations94
US9964863B1May 8, 2018
Post exposure processing apparatus
APPLIED MATERIALS INC22 citations94
US7695232B2Apr 13, 2010
Multi-level load lock chamber, transfer chamber, and robot suitable for interfacing with same
APPLIED MATERIALS INC17 citations90
US10474033B2Nov 12, 2019
Method and apparatus for post exposure processing of photoresist wafers
APPLIED MATERIALS INC4 citations84
US11262662B2Mar 1, 2022
Post exposure processing apparatus
APPLIED MATERIALS INC2 citations73
US11112697B2Sep 7, 2021
Method and apparatus for post exposure processing of photoresist wafers
APPLIED MATERIALS INC3 citations73
US10401742B2Sep 3, 2019
Post exposure processing apparatus
APPLIED MATERIALS INC1 citations73
US11776793B2Oct 3, 2023
Plasma source with ceramic electrode plate
APPLIED MATERIALS INC2 citations71
US9245767B2Jan 26, 2016
Anneal module for semiconductor wafers
APPLIED MATERIALS INC3 citations71
US11899366B2Feb 13, 2024
Method and apparatus for post exposure processing of photoresist wafers
APPLIED MATERIALS INC0 citations62
US9399827B2Jul 26, 2016
Microelectronic substrate electro processing system
APPLIED MATERIALS INC1 citations61
US7997851B2Aug 16, 2011
Apparatus and method for a multi-level load lock chamber, transfer chamber, and robot suitable for interfacing with same
APPLIED MATERIALS INC5 citations60
US12394604B2Aug 19, 2025
Plasma source with floating electrodes
APPLIED MATERIALS INC0 citations52
US10845715B2Nov 24, 2020
Post exposure processing apparatus
APPLIED MATERIALS INC0 citations52
US10837119B2Nov 17, 2020
Microelectronic substrate electro processing system
APPLIED MATERIALS INC0 citations51
US10087544B2Oct 2, 2018
Microelectronic substrate electro processing system
APPLIED MATERIALS INC0 citations51
US9714462B2Jul 25, 2017
Vacuum pre-wetting apparatus and methods
APPLIED MATERIALS INC0 citations48
AIR PROD & CHEM
6 patentsUS4946477AAug 7, 1990
IGCC process with combined methanol synthesis/water gas shift for methanol and electrical power production
AIR PROD & CHEM82 citations94
US5392594AFeb 28, 1995
Integrated production of fuel gas and oxygenated organic compounds from synthesis gas
AIR PROD & CHEM45 citations89
US5154062AOct 13, 1992
Continuous process for producing slush hydrogen
AIR PROD & CHEM28 citations89
US5220801AJun 22, 1993
Method and apparatus for maintenance of slush mixture at desired level during melt conditions
AIR PROD & CHEM17 citations72
US4980145ADec 25, 1990
Liquid phase carbon monoxide shift process
AIR PROD & CHEM15 citations72
US5280710AJan 25, 1994
Continuous process for producing slush hydrogen
AIR PROD & CHEM6 citations70