Inventor
SILVETTI DAVID
US5 patents
Patents
5 patentsUS6358573B1Mar 19, 2002
Mixed frequency CVD process
APPLIED MATERIALS INC130 citations98
US6098568AAug 8, 2000
Mixed frequency CVD apparatus
APPLIED MATERIALS INC106 citations97
US9399827B2Jul 26, 2016
Microelectronic substrate electro processing system
APPLIED MATERIALS INC1 citations61
US10837119B2Nov 17, 2020
Microelectronic substrate electro processing system
APPLIED MATERIALS INC0 citations51
US10087544B2Oct 2, 2018
Microelectronic substrate electro processing system
APPLIED MATERIALS INC0 citations51