Inventor
HELLER MARCEL
DE6 patents
⚠️ This page may combine multiple inventors who share the name “HELLER MARCEL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
INFINEON TECHNOLOGIES AG
4 patentsUS9029049B2May 12, 2015
Method for processing a carrier, a carrier, an electronic device and a lithographic mask
INFINEON TECHNOLOGIES AG1 citations61
US10241391B2Mar 26, 2019
Method for processing a carrier, a carrier, an electronic device and a lithographic mask
INFINEON TECHNOLOGIES AG0 citations50
US9613812B2Apr 4, 2017
Method for processing a carrier, a carrier, an electronic device and a lithographic mask
INFINEON TECHNOLOGIES AG0 citations50
US11640908B2May 2, 2023
Method of implanting an implant species into a substrate at different depths
INFINEON TECHNOLOGIES AG0 citations48