Inventor
CHENG NIAN-FUH
TW13 patents
⚠️ This page may combine multiple inventors who share the name “CHENG NIAN-FUH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
4 patentsUS10324369B2Jun 18, 2019
Methods for generating a mandrel mask
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations73
US9911606B2Mar 6, 2018
Mandrel spacer patterning in multi-pitch integrated circuit manufacturing
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations73
US9627262B2Apr 18, 2017
Method of patterning features of a semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US9880460B2Jan 30, 2018
Enhanced EUV lithography system
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
TAIWAN SEMICONDUCTOR MFG
3 patentsUS8945803B2Feb 3, 2015
Smart subfield method for E-beam lithography
TAIWAN SEMICONDUCTOR MFG26 citations92
US9023695B2May 5, 2015
Method of patterning features of a semiconductor device
TAIWAN SEMICONDUCTOR MFG11 citations82
US9395618B2Jul 19, 2016
Enhanced EUV lithography system
TAIWAN SEMICONDUCTOR MFG1 citations62
WANG HUNG-CHUN
3 patentsUS8601407B2Dec 3, 2013
Geometric pattern data quality verification for maskless lithography
WANG HUNG-CHUN31 citations92
US8473877B2Jun 25, 2013
Striping methodology for maskless lithography
WANG HUNG-CHUN26 citations92
US8468473B1Jun 18, 2013
Method for high volume e-beam lithography
WANG HUNG-CHUN34 citations92