Inventor
CHAN CHIH-JEN
TW11 patents
Patents
11 patentsUS10049890B2Aug 14, 2018
Semiconductor structure and method of manufacturing the same
TAIWAN SEMICONDUCTOR MFG CO LTD15 citations84
US9738516B2Aug 22, 2017
Structure to reduce backside silicon damage
TAIWAN SEMICONDUCTOR MFG CO LTD9 citations84
US9224615B2Dec 29, 2015
Noble gas bombardment to reduce scallops in bosch etching
TAIWAN SEMICONDUCTOR MFG CO LTD12 citations84
US10138118B2Nov 27, 2018
Structure to reduce backside silicon damage
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations73
US9434076B2Sep 6, 2016
Robot blade design
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations62
US9796584B2Oct 24, 2017
Method for fabricating a micro-well of a biosensor
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US9708179B2Jul 18, 2017
Method of improving getter efficiency by increasing superficial area
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US9637378B2May 2, 2017
Cup-like getter scheme
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US9606081B2Mar 28, 2017
Method for fabricating a micro-well of a biosensor
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations51
US9517927B2Dec 13, 2016
MEMS structure having rounded edge stopper and method of fabricating the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US9242853B2Jan 26, 2016
Method of improving getter efficiency by increasing superficial area
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations51