Inventor
ONISHI KOSHI
JP9 patents
Patents
9 patentsUS11275307B2Mar 15, 2022
Resist composition, method of forming resist pattern, polymeric compound, and compound
TOKYO OHKA KOGYO CO LTD9 citations84
US10908502B2Feb 2, 2021
Resist composition, method of forming resist pattern, polymeric compound, and compound
TOKYO OHKA KOGYO CO LTD8 citations83
US11448963B2Sep 20, 2022
Resist composition and method of forming resist pattern
TOKYO OHKA KOGYO CO LTD4 citations71
US10295905B2May 21, 2019
Resist composition, method for forming resist pattern, and polymer compound
TOKYO OHKA KOGYO CO LTD5 citations71
US11829068B2Nov 28, 2023
Resist composition, method of forming resist pattern, compound, and resin
TOKYO OHKA KOGYO CO LTD0 citations61
US12411408B2Sep 9, 2025
Resist composition and method of forming resist pattern
TOKYO OHKA KOGYO CO LTD0 citations51
US12449729B2Oct 21, 2025
Resist composition and method of forming resist pattern
TOKYO OHKA KOGYO CO LTD0 citations50
US11703756B2Jul 18, 2023
Resist composition and method of forming resist pattern
TOKYO OHKA KOGYO CO LTD0 citations50
US10414918B2Sep 17, 2019
Method of preparing polymer compound
TOKYO OHKA KOGYO CO LTD0 citations39