Inventor
NGUYEN KHANHTIN
JP9 patents
Patents
9 patentsUS11099479B2Aug 24, 2021
Resist composition, method of forming resist pattern, polymeric compound, and copolymer
TOKYO OHKA KOGYO CO LTD2 citations71
US10295905B2May 21, 2019
Resist composition, method for forming resist pattern, and polymer compound
TOKYO OHKA KOGYO CO LTD5 citations71
US11754922B2Sep 12, 2023
Resist composition and method of forming resist pattern
TOKYO OHKA KOGYO CO LTD0 citations50
US11703756B2Jul 18, 2023
Resist composition and method of forming resist pattern
TOKYO OHKA KOGYO CO LTD0 citations50
US11693316B2Jul 4, 2023
Resist composition and method of forming resist pattern
TOKYO OHKA KOGYO CO LTD0 citations48
US12498635B2Dec 16, 2025
Resist composition, method of forming resist pattern, and compound
TOKYO OHKA KOGYO CO LTD0 citations47
US12474637B2Nov 18, 2025
Resist composition, method of forming resist pattern, compound, and acid diffusion controlling agent
TOKYO OHKA KOGYO CO LTD0 citations47
US11874601B2Jan 16, 2024
Resist composition, method of forming resist pattern, compound, and acid diffusion-controlling agent
TOKYO OHKA KOGYO CO LTD0 citations47
US10414918B2Sep 17, 2019
Method of preparing polymer compound
TOKYO OHKA KOGYO CO LTD0 citations39