Inventor
PONGERS WILLEM RICHARD
NL9 patents
⚠️ This page may combine multiple inventors who share the name “PONGERS WILLEM RICHARD”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
8 patentsUS11846867B2Dec 19, 2023
Hollow-core photonic crystal fiber based broadband radiation generator
ASML NETHERLANDS BV3 citations71
US11372154B2Jun 28, 2022
Method, assembly, and apparatus for improved control of broadband radiation generation
ASML NETHERLANDS BV2 citations71
US7239370B2Jul 3, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV8 citations71
US11662669B2May 30, 2023
Apparatus and method for measuring substrate height
ASML NETHERLANDS BV2 citations65
US12393095B2Aug 19, 2025
Hollow-core photonic crystal fiber based broadband radiation generator
ASML NETHERLANDS BV0 citations60
US12204252B2Jan 21, 2025
Method for decision making in a semiconductor manufacturing process
ASML NETHERLANDS BV0 citations56
US11687007B2Jun 27, 2023
Method for decision making in a semiconductor manufacturing process
ASML NETHERLANDS BV1 citations56
US10394143B2Aug 27, 2019
Topography measurement system
ASML NETHERLANDS BV0 citations51