P

Inventor

NAGATA TAKESHI

JP76 patents
⚠️ This page may combine multiple inventors who share the name “NAGATA TAKESHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SHINETSU CHEMICAL CO

13 patents
US6440634B1Aug 27, 2002

Onium salts, photoacid generators for resist compositions, resist compositions, and patterning process

SHINETSU CHEMICAL CO76 citations96
US6749988B2Jun 15, 2004

Amine compounds, resist compositions and patterning process

SHINETSU CHEMICAL CO43 citations93
US6692893B2Feb 17, 2004

Onium salts, photoacid generators, resist compositions, and patterning process

SHINETSU CHEMICAL CO29 citations93
US6338931B1Jan 15, 2002

Resist compositions and patterning process

SHINETSU CHEMICAL CO35 citations93
US6274286B1Aug 14, 2001

Resist compositions

SHINETSU CHEMICAL CO46 citations93
US5849461ADec 15, 1998

Chemically amplified positive resist composition

SHINETSU CHEMICAL CO29 citations92
US5750309AMay 12, 1998

Chemically amplified positive resist composition

SHINETSU CHEMICAL CO39 citations92
US6030746AFeb 29, 2000

Di- and triphenyl monoterpene hydrocarbon derivatives, dissolution inhibitors, and chemically amplified positive resist compositions

SHINETSU CHEMICAL CO13 citations74
US9658530B2May 23, 2017

Process for forming multi-layer film and patterning process

SHINETSU CHEMICAL CO2 citations73
US11846884B2Dec 19, 2023

Chemically amplified resist composition and patterning process

SHINETSU CHEMICAL CO5 citations72
US11835859B2Dec 5, 2023

Resist composition and patterning process

SHINETSU CHEMICAL CO2 citations71
US10811247B2Oct 20, 2020

Method of cleaning and drying semiconductor substrate

SHINETSU CHEMICAL CO1 citations63
US9524863B2Dec 20, 2016

Method for cleaning and drying semiconductor substrate

SHINETSU CHEMICAL CO2 citations63

ROHM CO LTD

6 patents

YASKAWA ELECTRIC CORP

5 patents

NISSHIN SPINNING

3 patents

NIPPON ELECTRIC GLASS CO

3 patents

HATAKEYAMA JUN

3 patents

FUJIFILM CORP

3 patents

MITSUBISHI HEAVY IND LTD

3 patents

FUJI PHOTO FILM CO LTD

2 patents

SHIN ETSU CHEMICAL C LTD

1 patent

TOYODA GOSEI KK

1 patent

NIPPON STEEL CORP

1 patent

BRIDGESTONE CORP

1 patent

MIZUHO INF & RES INST INC

1 patent

KOJI YOSHINOBU

1 patent

WATANABE TAKERU

1 patent

NAGATA TAKESHI

1 patent

SEKISUI JUSHI KK

1 patent

Showing the top 50 of 76 patents by PatentIndex Score.