Inventor
ANTTILA JAAKKO
FI15 patents
Patents
15 patentsUS10115603B2Oct 30, 2018
Removal of surface passivation
ASM IP HOLDING BV48 citations97
US9490145B2Nov 8, 2016
Removal of surface passivation
ASM IP HOLDING BV78 citations97
US10741411B2Aug 11, 2020
Removal of surface passivation
ASM IP HOLDING BV19 citations93
US10002936B2Jun 19, 2018
Titanium aluminum and tantalum aluminum thin films
ASM IP HOLDING BV4 citations83
US9412602B2Aug 9, 2016
Deposition of smooth metal nitride films
ASM IP HOLDING BV12 citations83
US12129545B2Oct 29, 2024
Precursor capsule, a vessel and a method
ASM IP HOLDING BV2 citations72
US11062914B2Jul 13, 2021
Removal of surface passivation
ASM IP HOLDING BV2 citations72
US10636889B2Apr 28, 2020
Titanium aluminum and tantalum aluminum thin films
ASM IP HOLDING BV1 citations72
US9704716B2Jul 11, 2017
Deposition of smooth metal nitride films
ASM IP HOLDING BV2 citations72
US12237392B2Feb 25, 2025
Titanium aluminum and tantalum aluminum thin films
ASM IP HOLDING BV0 citations62
US11646194B2May 9, 2023
Methods for forming silicon nitride thin films
ASM IP HOLDING BV0 citations62
US11421321B2Aug 23, 2022
Apparatuses for thin film deposition
ASM IP HOLDING BV0 citations62
US11139383B2Oct 5, 2021
Titanium aluminum and tantalum aluminum thin films
ASM IP HOLDING BV0 citations62
US10074541B2Sep 11, 2018
Deposition of smooth metal nitride films
ASM IP HOLDING BV1 citations62
US10573511B2Feb 25, 2020
Methods for forming silicon nitride thin films
ASM IP HOLDING BV0 citations52