Inventor
Margavio Patrick
US14 patents
Patents
14 patentsUS10760465B2Sep 1, 2020
Heater element having targeted decreasing temperature resistance characteristics
WATLOW ELECTRIC MFG7 citations92
US11340121B2May 24, 2022
Heater element having targeted decreasing temperature resistance characteristics
WATLOW ELECTRIC MFG0 citations72
US11083050B2Aug 3, 2021
Integrated heater and method of manufacture
WATLOW ELECTRIC MFG2 citations72
US12127310B2Oct 22, 2024
Multi-zone pedestal heater without vias
WATLOW ELECTRIC MFG1 citations71
US10448458B2Oct 15, 2019
Electric heaters with low drift resistance feedback
WATLOW ELECTRIC MFG3 citations67
US11751289B2Sep 5, 2023
Integrated heater and method of manufacture
WATLOW ELECTRIC MFG1 citations62
US11895741B2Feb 6, 2024
Multi-zone pedestal heater having a routing layer
WATLOW ELECTRIC MFG0 citations60
US11382180B2Jul 5, 2022
Multi-zone pedestal heater having a routing layer
WATLOW ELECTRIC MFG0 citations60
US11343879B2May 24, 2022
Multi-zone pedestal heater without vias
WATLOW ELECTRIC MFG0 citations60
US11622421B2Apr 4, 2023
Electric heaters with low drift resistance feedback
WATLOW ELECTRIC MFG0 citations58
US10882130B2Jan 5, 2021
Ceramic-aluminum assembly with bonding trenches
WATLOW ELECTRIC MFG0 citations56
US11943845B2Mar 26, 2024
Ceramic heater and method of forming using transient liquid phase bonding
WATLOW ELECTRIC MFG0 citations54
US12046502B2Jul 23, 2024
Electrostatic puck and method of manufacture
WATLOW ELECTRIC MFG0 citations50
US10681778B2Jun 9, 2020
Integrated heater and method of manufacture
WATLOW ELECTRIC MFG0 citations50