Inventor
ENGLISH KURT
US8 patents
Patents
8 patentsUS12127310B2Oct 22, 2024
Multi-zone pedestal heater without vias
WATLOW ELECTRIC MFG1 citations71
US11895741B2Feb 6, 2024
Multi-zone pedestal heater having a routing layer
WATLOW ELECTRIC MFG0 citations60
US11382180B2Jul 5, 2022
Multi-zone pedestal heater having a routing layer
WATLOW ELECTRIC MFG0 citations60
US11343879B2May 24, 2022
Multi-zone pedestal heater without vias
WATLOW ELECTRIC MFG0 citations60
US10882130B2Jan 5, 2021
Ceramic-aluminum assembly with bonding trenches
WATLOW ELECTRIC MFG0 citations56
US11943845B2Mar 26, 2024
Ceramic heater and method of forming using transient liquid phase bonding
WATLOW ELECTRIC MFG0 citations54
US12046502B2Jul 23, 2024
Electrostatic puck and method of manufacture
WATLOW ELECTRIC MFG0 citations50
US10681778B2Jun 9, 2020
Integrated heater and method of manufacture
WATLOW ELECTRIC MFG0 citations50