Inventor
SHINODA MASAICHI
5 patents
Patents
5 patentsUS4298629ANov 3, 1981
Method for forming a nitride insulating film on a silicon semiconductor substrate surface by direct nitridation
FUJITSU LTD76 citations95
US4343657AAug 10, 1982
Process for producing a semiconductor device
FUJITSU LTD32 citations92
US4349395ASep 14, 1982
Method for producing MOS semiconductor device
FUJITSU LTD6 citations73
US4270136AMay 26, 1981
MIS Device having a metal and insulating layer containing at least one cation-trapping element
FUJITSU LTD8 citations73
US4153906AMay 8, 1979
Integrated circuit using an insulated gate field effect transistor
FUJITSU LTD6 citations62