Inventor
MOLZEN JR WALTER W
US3 patents
Patents
3 patentsUS5051598ASep 24, 1991
Method for correcting proximity effects in electron beam lithography
IBM97 citations91
US4316093AFeb 16, 1982
Sub-100A range line width pattern fabrication
IBM17 citations71
US4621232ANov 4, 1986
Inspection of unsintered single layer or multilayer ceramics using a broad area electrical contacting structure
IBM12 citations70