Inventor
WARFIELD TIMOTHY J
US5 patents
Patents
5 patentsUS5604160AFeb 18, 1997
Method for packaging semiconductor devices
MOTOROLA INC66 citations93
US5512163AApr 30, 1996
Method for forming a planarization etch stop
MOTOROLA INC38 citations90
US5411629AMay 2, 1995
Method for roughening surface of halocarbon film
MOTOROLA INC24 citations90
US5232563AAug 3, 1993
Method of cleaning a semiconductor wafer
MOTOROLA INC17 citations71
US6146541ANov 14, 2000
Method of manufacturing a semiconductor device that uses a calibration standard
MOTOROLA INC14 citations66