Inventor

VUKELIC MICHAEL

US3 patents

⚠️ This page may combine multiple inventors who share the name “VUKELIC MICHAEL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LSI LOGIC CORP

2 patents

US5268034ADec 7, 1993

Fluid dispersion head for CVD appratus

LSI LOGIC CORP83 citations91

US5286519AFeb 15, 1994

Fluid dispersion head

LSI LOGIC CORP17 citations68

SU SHYANG

1 patent

US8568597B2Oct 29, 2013

Process for purifying silicon source material by high gravity rotating packed beds

SU SHYANG3 citations47