Inventor
KOHDA YUZO
JP14 patents
Patents
14 patentsUS5266116ANov 30, 1993
Glow discharge apparatus for continuously manufacturing semiconductor device comprising gas gates with slotted rollers
CANON KK59 citations96
US6399411B1Jun 4, 2002
Method for forming non-single-crystal semiconductor thin film, and method for producing photovoltaic device
CANON KK35 citations92
US6313430B1Nov 6, 2001
Plasma processing apparatus and plasma processing method
CANON KK26 citations92
US6271055B1Aug 7, 2001
Process for manufacturing semiconductor element using non-monocrystalline semiconductor layers of first and second conductivity types and amorphous and microcrystalline I-type semiconductor layers
CANON KK28 citations92
US6162988ADec 19, 2000
Photovoltaic element
CANON KK18 citations92
US6159763ADec 12, 2000
Method and device for forming semiconductor thin film, and method and device for forming photovoltaic element
CANON KK39 citations92
US6159300ADec 12, 2000
Apparatus for forming non-single-crystal semiconductor thin film, method for forming non-single-crystal semiconductor thin film, and method for producing photovoltaic device
CANON KK23 citations92
US6153013ANov 28, 2000
Deposited-film-forming apparatus
CANON KK47 citations92
US5927994AJul 27, 1999
Method for manufacturing thin film
CANON KK38 citations92
US5897332AApr 27, 1999
Method for manufacturing photoelectric conversion element
CANON KK20 citations92
US5284525AFeb 8, 1994
Solar cell
CANON KK21 citations92
US6368944B1Apr 9, 2002
Method of manufacturing photovoltaic element and apparatus therefor
CANON KK6 citations74
US5382531AJan 17, 1995
Method for continuously manufacturing a semiconductor device
CANON KK7 citations74
US6530341B1Mar 11, 2003
Deposition apparatus for manufacturing thin film
CANON KK3 citations63