Inventor

SMITH HENRY I

US51 patents

⚠️ This page may combine multiple inventors who share the name “SMITH HENRY I”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SMITH HENRY I

MASSACHUSETTS INST TECHNOLOGY

Maskless lithography using a multiplexed array of fresnel zone plates

Optical interference alignment and gapping apparatus

Optical gap measuring apparatus and method having two-dimensional grating mark with chirp in one direction

Alignment of diffraction gratings

Optical alignment apparatus having multiple parallel alignment marks

Lithography mask with a π-phase shifting attenuator

Spatial period division exposing

Orientation of ordered liquids and their use in devices

On-axis interferometric alignment of plates using the spatial phase of interference patterns

Plate aligning

Holographic lithography

Graphoepitaxy using energy beams

Method of entraining dislocations and other crystalline defects in heated film contacting patterned region

System and method for manipulating micro-particles using electromagnetic fields

System and method for maskless lithography using an array of sources and an array of focusing elements

Scintillating fiducial patterns

X-ray lithography masking

Orientation of ordered liquids and their use in devices

Nanocrystal structures

Energy beam locating

System and method for absorbance modulation lithography

System and method for contrast enhanced zone plate array lithography

System and method for maskless lithography using an array of improved diffractive focusing elements

Enhancing epitaxy and preferred orientation

Soft X-ray mask alignment system

Supported membrane composite structure and its method of manufacture

System and method for absorbance modulation lithography

System and method for contrast enhanced zone plate array lithography

Thick crystalline films on foreign substrates

Graphoepitaxy by encapsulation

Nanocrystal structures

Spatial-phase locking of energy beams for determining two-dimensional location and beam shape

Epitaxy with reusable template

Method of manufacture of a soft-X-ray mask

System and method for proximity effect correction in imaging systems

System and method for holographic fabrication and replication of diffractive optical elements for maskless lithography

Orientation filtering for crystalline films

Surface wave devices for processing signals

System and method for performing multi-resolution lithography

Imaging system and method employing beam folding

System and method for maskless lithography using an array of sources and an array of focusing elements

Product made by method of entraining dislocations and other crystalline defects

System and method for fabrication and replication of diffractive optical elements for maskless lithography

MASSASCUSETTS INST OF TECHNOLO

Wavelength-selective optical add/drop switch

SMITH EILEEN M

Removing perspiration

UNIV LOUISIANA STATE

Adaptive lithography membrane masks

IBM

Spatial phase locking with shaped electron beam lithography

MENON RAJESH

Nanoscale imaging via absorption modulation

LUCENT TECHNOLOGIES INC

Reduced stress tungsten deposition

EISLER HANS J

Nanocrystal structures