Inventor

ZEIDLER DIRK

DE47 patents

⚠️ This page may combine multiple inventors who share the name “ZEIDLER DIRK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ZEIDLER DIRK

CARL ZEISS MULTISEM GMBH

Particle beam system and method for the particle-optical examination of an object

Charged particle beam system

Charged particle beam system and method

Charged particle beam system and method

Multi-beam particle microscope

Method for operating a multi-beam particle beam microscope

System combination of a particle beam system and a light-optical system with collinear beam guidance, and use of the system combination

Particle beam system and method for the particle-optical examination of an object

Charged particle beam system

Charged particle beam system

Method for operating a multi-beam particle beam microscope

Method of imaging a 3D sample with a multi-beam particle microscope

Multi-beam charged particle system

Particle beam system and the use thereof for flexibly setting the current intensity of individual particle beams

Particle beam system for adjusting the current of individual particle beams

Method for operating a multi-beam particle beam microscope

System comprising a multi-beam particle microscope and method for operating the same

System comprising a multi-beam particle microscope and method for operating the same

Method of imaging a 2D sample with a multi-beam particle microscope

Multiple particle beam microscope and associated method with fast autofocus around an adjustable working distance

Method for detector equalization during the imaging of objects with a multi-beam particle microscope

Particle beam system including a multi-beam deflection device and a beam stop, method for operating the particle beam system and associated computer program product

Multiple particle beam microscope and associated method with an improved focus setting taking into account an image plane tilt

Multi-beam particle beam system and method for operating same

Particle beam system for azimuthal deflection of individual particle beams and method for azimuth correction in a particle beam system

Certain improvements of multi-beam generating and multi-beam deflecting units

Particle beam system

Method for area-wise inspecting a sample via a multi-beam particle microscope, computer program product and multi-beam particle microscope for semiconductor sample inspection, and its use

ZEISS CARL MICROSCOPY GMBH

Particle beam system and method for the particle-optical examination of an object

Method for operating a multi-beam particle microscope

Multi-beam charged particle system

Particle beam system

Particle optical system

Charged particle multi-beam inspection system and method of operating the same

Particle beam system and method for operating a particle optical unit

Method of detecting electrons, an electron-detector and an inspection system

Particle beam system and method for the particle-optical examination of an object

Particle beam system

Particle beam system and method for operating a particle optical unit

Particle beam system

Methods and devices for charge compensation

ZEIDLER DIRK

Particle beam system

Particle-optical systems and arrangements and particle-optical components for such systems and arrangements

Inspection system

APPLIED MATERIALS ISRAEL LTD

Particle-optical systems and arrangements and particle-optical components for such systems and arrangements

BOSCH GMBH ROBERT

Seam test on a fuel injection pump, and the fuel injection pump required for applying same

ZEISS CARL SMT GMBH

Method of recording an image using a particle microscope