Inventor
MA DIANA
US12 patents
⚠️ This page may combine multiple inventors who share the name “MA DIANA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
11 patentsUS6352611B1Mar 5, 2002
Ceramic composition for an apparatus and method for processing a substrate
APPLIED MATERIALS INC97 citations98
US6123791ASep 26, 2000
Ceramic composition for an apparatus and method for processing a substrate
APPLIED MATERIALS INC118 citations98
US6458516B1Oct 1, 2002
Method of etching dielectric layers using a removable hardmask
APPLIED MATERIALS INC113 citations97
US6641697B2Nov 4, 2003
Substrate processing using a member comprising an oxide of a group IIIB metal
APPLIED MATERIALS INC53 citations96
US6352049B1Mar 5, 2002
Plasma assisted processing chamber with separate control of species density
APPLIED MATERIALS INC498 citations96
US6071372AJun 6, 2000
RF plasma etch reactor with internal inductive coil antenna and electrically conductive chamber walls
APPLIED MATERIALS INC69 citations95
US6592707B2Jul 15, 2003
Corrosion-resistant protective coating for an apparatus and method for processing a substrate
APPLIED MATERIALS INC63 citations93
US6296780B1Oct 2, 2001
System and method for etching organic anti-reflective coating from a substrate
APPLIED MATERIALS INC44 citations92
US6466881B1Oct 15, 2002
Method for monitoring the quality of a protective coating in a reactor chamber
APPLIED MATERIALS INC40 citations91
US6270687B1Aug 7, 2001
RF plasma method
APPLIED MATERIALS INC42 citations91
US6413389B1Jul 2, 2002
Method for recovering metal from etch by-products
APPLIED MATERIALS INC9 citations73