Inventor
CHUI BENJAMIN W
US7 patents
⚠️ This page may combine multiple inventors who share the name “CHUI BENJAMIN W”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
UNIV LELAND STANFORD JUNIOR
3 patentsUS6389899B1May 21, 2002
In-plane micromachined accelerometer and bridge circuit having same
UNIV LELAND STANFORD JUNIOR100 citations95
US5959200ASep 28, 1999
Micromachined cantilever structure providing for independent multidimensional force sensing using high aspect ratio beams
UNIV LELAND STANFORD JUNIOR77 citations95
US6025208AFeb 15, 2000
Method of making electrical elements on the sidewalls of micromechanical structures
UNIV LELAND STANFORD JUNIOR26 citations92