Inventor
SHIGEOKA TAKASHI
JP16 patents
⚠️ This page may combine multiple inventors who share the name “SHIGEOKA TAKASHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
11 patentsUS6479801B1Nov 12, 2002
Temperature measuring method, temperature control method and processing apparatus
TOKYO ELECTRON LTD87 citations97
US6891131B2May 10, 2005
Thermal processing system
TOKYO ELECTRON LTD25 citations92
US6876816B2Apr 5, 2005
Heating device, heat treatment apparatus having the heating device and method for controlling heat treatment
TOKYO ELECTRON LTD30 citations92
US6437290B1Aug 20, 2002
Heat treatment apparatus having a thin light-transmitting window
TOKYO ELECTRON LTD48 citations92
US7717061B2May 18, 2010
Gas switching mechanism for plasma processing apparatus
TOKYO ELECTRON LTD20 citations84
US6641302B2Nov 4, 2003
Thermal process apparatus for a semiconductor substrate
TOKYO ELECTRON LTD13 citations84
US6825615B2Nov 30, 2004
Lamp having a high-reflectance film for improving directivity of light and heat treatment apparatus having such a lamp
TOKYO ELECTRON LTD14 citations83
US6488407B1Dec 3, 2002
Radiation temperature measuring method and radiation temperature measuring system
TOKYO ELECTRON LTD14 citations83
US6467952B2Oct 22, 2002
Virtual blackbody radiation system and radiation temperature measuring system
TOKYO ELECTRON LTD12 citations73
US6860634B2Mar 1, 2005
Temperature measuring method, heat treating device and method, computer program, and radiation thermometer
TOKYO ELECTRON LTD6 citations62
US6534749B2Mar 18, 2003
Thermal process apparatus for measuring accurate temperature by a radiation thermometer
TOKYO ELECTRON LTD1 citations51