Inventor
HUEBER JEAN-MARC
US8 patents
Patents
8 patentsUS6018537AJan 25, 2000
Reliable, modular, production quality narrow-band high rep rate F2 laser
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US6414979B2Jul 2, 2002
Gas discharge laser with blade-dielectric electrode
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US6317447B1Nov 13, 2001
Electric discharge laser with acoustic chirp correction
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US6442181B1Aug 27, 2002
Extreme repetition rate gas discharge laser
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US6466602B1Oct 15, 2002
Gas discharge laser long life electrodes
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US6553049B1Apr 22, 2003
ArF laser with low pulse energy and high rep rate
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USRE38054EApr 1, 2003
Reliable, modular, production quality narrow-band high rep rate F2 laser
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US6363094B1Mar 26, 2002
Gas discharge laser electrode with reduced sensitivity to adverse boundary layer effects
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