Inventor
KITAMOTO TORU
JP7 patents
Patents
7 patentsUS7280883B2Oct 9, 2007
Substrate processing system managing apparatus information of substrate processing apparatus
DAINIPPON SCREEN MFG19 citations92
US7047100B2May 16, 2006
Substrate processing system managing apparatus information of substrate processing apparatus
DAINIPPON SCREEN MFG26 citations92
US6837632B2Jan 4, 2005
Substrate treating apparatus
DAINIPPON SCREEN MFG30 citations90
US5428747AJun 27, 1995
Print management system utilizing separate storage units for storing image, edit, and control information relating to prepress jobs thereof
DAINIPPON SCREEN MFG41 citations90
US7460923B2Dec 2, 2008
Substrate processing system managing apparatus information of substrate processing apparatus
DAINIPPON SCREEN MFG5 citations73
US7333867B2Feb 19, 2008
Substrate processing system managing apparatus information of substrate processing apparatus
DAINIPPON SCREEN MFG8 citations73
US7698107B2Apr 13, 2010
Managing apparatus for substrate processing system
DAINIPPON SCREEN MFG3 citations62