Inventor
MANN HANS-JURGEN
DE5 patents
Patents
5 patentsUS7682031B2Mar 23, 2010
Catoptric objectives and systems using catoptric objectives
ZEISS CARL SMT AG48 citations97
US7190530B2Mar 13, 2007
Projection objectives including a plurality of mirrors with lenses ahead of mirror M3
ZEISS CARL SMT AG56 citations95
USRE42118EFeb 8, 2011
Projection system for EUV lithography
ZEISS CARL SMT AG20 citations92
US7209286B2Apr 24, 2007
Objective with pupil obscuration
ZEISS CARL SMT AG32 citations91
US7576934B2Aug 18, 2009
Groupwise corrected objective
ZEISS CARL SMT AG0 citations38