Inventor
SOMMARGREN GARY E
US34 patents
⚠️ This page may combine multiple inventors who share the name “SOMMARGREN GARY E”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ZYGO CORP
21 patentsUS4963022AOct 16, 1990
Method and apparatus for generating a straight reference line
ZYGO CORP78 citations96
US4859066AAug 22, 1989
Linear and angular displacement measuring interferometer
ZYGO CORP95 citations96
US4733967AMar 29, 1988
Apparatus for the measurement of the refractive index of a gas
ZYGO CORP77 citations96
US4685803AAug 11, 1987
Method and apparatus for the measurement of the refractive index of a gas
ZYGO CORP71 citations96
US4606638AAug 19, 1986
Distance measuring interferometer and method of use
ZYGO CORP110 citations96
US4594003AJun 10, 1986
Interferometric wavefront measurement
ZYGO CORP112 citations96
US4802765AFeb 7, 1989
Differential plane mirror having beamsplitter/beam folder assembly
ZYGO CORP94 citations95
US4688940AAug 25, 1987
Heterodyne interferometer system
ZYGO CORP103 citations94
US5218424AJun 8, 1993
Flying height and topography measuring interferometer
ZYGO CORP26 citations92
US5133599AJul 28, 1992
High accuracy linear displacement interferometer with probe
ZYGO CORP23 citations92
US4950078AAug 21, 1990
High accuracy differential plane mirror interferometer
ZYGO CORP23 citations92
US4881815ANov 21, 1989
Linear and angular displacement measuring interferometer
ZYGO CORP41 citations92
US4752133AJun 21, 1988
Differential plane mirror interferometer
ZYGO CORP32 citations92
US4746216AMay 24, 1988
Angle measuring interferometer
ZYGO CORP44 citations92
US4693605ASep 15, 1987
Differential plane mirror interferometer
ZYGO CORP42 citations92
US4687958AAug 18, 1987
Apparatus to transform a single frequency, linearly polarized laser beam into a high efficiency beam with two, orthogonally polarized frequencies
ZYGO CORP26 citations92
US4684828AAug 4, 1987
Apparatus to transform a single frequency, linearly polarized laser beam into a beam with two, orthogonally polarized frequencies
ZYGO CORP37 citations92
US4787747ANov 29, 1988
Straightness of travel interferometer
ZYGO CORP33 citations91
US4717250AJan 5, 1988
Angle measuring interferometer
ZYGO CORP21 citations82
US4807997AFeb 28, 1989
Angular displacement measuring interferometer
ZYGO CORP16 citations74
US5028137AJul 2, 1991
Angular displacement measuring interferometer
ZYGO CORP16 citations72
UNIV CALIFORNIA
8 patentsUS5969848AOct 19, 1999
Micromachined electrostatic vertical actuator
UNIV CALIFORNIA126 citations97
US5933236AAug 3, 1999
Phase shifting interferometer
UNIV CALIFORNIA62 citations96
US5548403AAug 20, 1996
Phase shifting diffraction interferometer
UNIV CALIFORNIA70 citations96
US6704112B1Mar 9, 2004
Application of the phase shifting diffraction interferometer for measuring convex mirrors and negative lenses
UNIV CALIFORNIA13 citations81
US6177993B1Jan 23, 2001
Inspection of lithographic mask blanks for defects
UNIV CALIFORNIA10 citations74
US6014264AJan 11, 2000
Embedded fiducials in optical surfaces
UNIV CALIFORNIA6 citations74
US6876456B2Apr 5, 2005
Absolute calibration of optical flats
UNIV CALIFORNIA5 citations63
US6909510B2Jun 21, 2005
Application of the phase shifting diffraction interferometer for measuring convex mirrors and negative lenses
UNIV CALIFORNIA3 citations60