Inventor
TOKUDA MITSUO
JP17 patents
⚠️ This page may combine multiple inventors who share the name “TOKUDA MITSUO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
14 patentsUS6927391B2Aug 9, 2005
Method and apparatus for processing a micro sample
HITACHI LTD69 citations99
US6781125B2Aug 24, 2004
Method and apparatus for processing a micro sample
HITACHI LTD114 citations99
US6664552B2Dec 16, 2003
Method and apparatus for specimen fabrication
HITACHI LTD139 citations99
US5134965AAug 4, 1992
Processing apparatus and method for plasma processing
HITACHI LTD866 citations98
US7550750B2Jun 23, 2009
Method and apparatus for processing a micro sample
HITACHI LTD26 citations96
US7205560B2Apr 17, 2007
Method and apparatus for processing a micro sample
HITACHI LTD32 citations96
US7205554B2Apr 17, 2007
Method and apparatus for processing a micro sample
HITACHI LTD34 citations96
US6794663B2Sep 21, 2004
Method and apparatus for specimen fabrication
HITACHI LTD33 citations96
US4985109AJan 15, 1991
Apparatus for plasma processing
HITACHI LTD99 citations95
US7888639B2Feb 15, 2011
Method and apparatus for processing a micro sample
HITACHI LTD14 citations93
US7470918B2Dec 30, 2008
Method and apparatus for processing a micro sample
HITACHI LTD22 citations93
US7465945B2Dec 16, 2008
Method and apparatus for processing a micro sample
HITACHI LTD20 citations93
US7897936B2Mar 1, 2011
Method and apparatus for specimen fabrication
HITACHI LTD15 citations92
US7268356B2Sep 11, 2007
Method and apparatus for specimen fabrication
HITACHI LTD28 citations92