Inventor
CLINE JUNE
US4 patents
Patents
4 patentsUS7893479B2Feb 22, 2011
Deep trench in a semiconductor structure
IBM1 citations59
US7101806B2Sep 5, 2006
Deep trench formation in semiconductor device fabrication
IBM4 citations59
US7115210B2Oct 3, 2006
Measurement to determine plasma leakage
IBM5 citations54
US7573085B2Aug 11, 2009
Deep trench formation in semiconductor device fabrication
IBM0 citations48