Inventor

LAGERQUIST MARK

US3 patents

Patents

3 patents

US7893479B2Feb 22, 2011

Deep trench in a semiconductor structure

IBM1 citations59

US7101806B2Sep 5, 2006

Deep trench formation in semiconductor device fabrication

IBM4 citations59

US7573085B2Aug 11, 2009

Deep trench formation in semiconductor device fabrication

IBM0 citations48