Inventor
FUJIMARU SYUZO
JP3 patents
Patents
3 patentsUS6526329B2Feb 25, 2003
Substrate processing system and substrate processing method
TOKYO ELECTRON LTD64 citations93
US7844359B2Nov 30, 2010
Coating and developing apparatus, operating method for same, and storage medium for the method
TOKYO ELECTRON LTD4 citations58
US7618203B2Nov 17, 2009
Substrate processing method, substrate processing apparatus, and computer readable storage medium
TOKYO ELECTRON LTD6 citations57