Inventor

YAMAMOTO KENSEI

JP3 patents

⚠️ This page may combine multiple inventors who share the name “YAMAMOTO KENSEI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

UEDA ISSEI

1 patent

US8206076B2Jun 26, 2012

Substrate processing system

UEDA ISSEI8 citations78

KOIKE TAKUJI

1 patent

US8520867B2Aug 27, 2013

Embedded audiphone

KOIKE TAKUJI10 citations70

TOKYO ELECTRON LTD

1 patent

US7618203B2Nov 17, 2009

Substrate processing method, substrate processing apparatus, and computer readable storage medium

TOKYO ELECTRON LTD6 citations57