Inventor
KANAYAMA TOSHIHIKO
JP18 patents
⚠️ This page may combine multiple inventors who share the name “KANAYAMA TOSHIHIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
AGENCY IND SCIENCE TECHN
7 patentsUS5935454AAug 10, 1999
Ultrafine fabrication method
AGENCY IND SCIENCE TECHN27 citations92
US5382801AJan 17, 1995
Method for producing minute particles and apparatus therefor
AGENCY IND SCIENCE TECHN28 citations92
US4815850AMar 28, 1989
Relative-displacement measurement method
AGENCY IND SCIENCE TECHN47 citations92
US6117617ASep 12, 2000
Patterning method utilizing electron beam resist containing methanofullerene compound
AGENCY IND SCIENCE TECHN29 citations89
US5647999AJul 15, 1997
Method for fine patterning of a polymeric film
AGENCY IND SCIENCE TECHN12 citations73
US5469323ANov 21, 1995
Method and apparatus for trapping charged particles
AGENCY IND SCIENCE TECHN13 citations73
US6680411B2Jan 20, 2004
Carborane supercluster and method of producing same
AGENCY IND SCIENCE TECHN1 citations51
NAT INST OF ADVANCED IND SCIEN
3 patentsUS7687801B2Mar 30, 2010
Dopant material, dopant material manufacturing method, and semiconductor device using the same
NAT INST OF ADVANCED IND SCIEN3 citations62
US7408635B2Aug 5, 2008
Optical measurement method and device
NAT INST OF ADVANCED IND SCIEN4 citations57
US8367030B2Feb 5, 2013
Thin film of metal-silicon compound and process for producing the thin film of the metal-silicon compound
NAT INST OF ADVANCED IND SCIEN0 citations51