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Inventor
ISHIHARA MASUNORI
JP
3 patents
⚠️ This page may combine multiple inventors who share the name “ISHIHARA MASUNORI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
INOUE YOSHIHARU
1 patent
US8207066B2
Jun 26, 2012
Dry etching method
INOUE YOSHIHARU
6 citations
70
HITACHI HIGH TECH CORP
1 patent
US7909933B2
Mar 22, 2011
Plasma processing method
HITACHI HIGH TECH CORP
1 citations
48
ISHIHARA MASUNORI
1 patent
US8277563B2
Oct 2, 2012
Plasma processing method
ISHIHARA MASUNORI
0 citations
41