Inventor
SAKAGUCHI MASAMICHI
JP12 patents
⚠️ This page may combine multiple inventors who share the name “SAKAGUCHI MASAMICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI HIGH TECH CORP
4 patentsUS6919274B2Jul 19, 2005
LSI device etching method and apparatus thereof
HITACHI HIGH TECH CORP18 citations81
US6709984B2Mar 23, 2004
Method for manufacturing semiconductor device
HITACHI HIGH TECH CORP9 citations69
US7909933B2Mar 22, 2011
Plasma processing method
HITACHI HIGH TECH CORP1 citations48
US7913646B2Mar 29, 2011
Vacuum processing apparatus and vacuum processing method
HITACHI HIGH TECH CORP1 citations46
HITACHI LTD
3 patentsUS6620737B2Sep 16, 2003
Plasma etching method
HITACHI LTD13 citations83
US6617255B2Sep 9, 2003
Plasma processing method for working the surface of semiconductor devices
HITACHI LTD7 citations72
US7098138B2Aug 29, 2006
Plasma processing method for working the surface of semiconductor devices
HITACHI LTD2 citations61