Inventor
BENNER STEPHEN J
US13 patents
⚠️ This page may combine multiple inventors who share the name “BENNER STEPHEN J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TBW IND INC
11 patentsUS7909910B2Mar 22, 2011
Vacuum line clean-out separator system
TBW IND INC21 citations92
US7575503B2Aug 18, 2009
Vacuum-assisted pad conditioning system
TBW IND INC19 citations92
US7544113B1Jun 9, 2009
Apparatus for controlling the forces applied to a vacuum-assisted pad conditioning system
TBW IND INC19 citations92
US7258600B1Aug 21, 2007
Vacuum-assisted pad conditioning system
TBW IND INC33 citations92
US7040967B2May 9, 2006
Multi-step, in-situ pad conditioning system and method for chemical mechanical planarization
TBW IND INC34 citations92
US7901267B1Mar 8, 2011
Method for controlling the forces applied to a vacuum-assisted pad conditioning system
TBW IND INC8 citations83
US7217172B2May 15, 2007
Enhanced end effector arm arrangement for CMP pad conditioning
TBW IND INC19 citations83
US7052371B2May 30, 2006
Vacuum-assisted pad conditioning system and method utilizing an apertured conditioning disk
TBW IND INC13 citations83
US8025555B1Sep 27, 2011
System for measuring and controlling the level of vacuum applied to a conditioning holder within a CMP system
TBW IND INC3 citations62
US7913705B2Mar 29, 2011
Cleaning cup system for chemical mechanical planarization apparatus
TBW IND INC3 citations62
US7166014B2Jan 23, 2007
Chemical mechanical planarization process control utilizing in-situ conditioning process
TBW IND INC6 citations62