Inventor
YAGITA TAKANORI
JP17 patents
⚠️ This page may combine multiple inventors who share the name “YAGITA TAKANORI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SUMITOMO HEAVY IND ION TECHNOLOGY CO LTD
4 patentsUS9293295B2Mar 22, 2016
Ion implantation apparatus, final energy filter, and ion implantation method
SUMITOMO HEAVY IND ION TECHNOLOGY CO LTD16 citations82
US9236222B2Jan 12, 2016
Ion implantation apparatus and ion implantation method
SUMITOMO HEAVY IND ION TECHNOLOGY CO LTD2 citations62
US9343262B2May 17, 2016
Ion implantation apparatus, beam parallelizing apparatus, and ion implantation method
SUMITOMO HEAVY IND ION TECHNOLOGY CO LTD0 citations51
US9208991B1Dec 8, 2015
Ion implantation apparatus
SUMITOMO HEAVY IND ION TECHNOLOGY CO LTD0 citations40
SEN CORP AN SHI AND AXCELIS CO
3 patentsUS7276711B2Oct 2, 2007
Beam space-charge compensation device and ion implantation system having the same
SEN CORP AN SHI AND AXCELIS CO11 citations83
US7315034B2Jan 1, 2008
Irradiation system with ion beam/charged particle beam
SEN CORP AN SHI AND AXCELIS CO7 citations73
US7423276B2Sep 9, 2008
Irradiation system with ion beam/charged particle beam
SEN CORP AN SHI AND AXCELIS CO5 citations61
SEN CORP
3 patentsUS8692216B2Apr 8, 2014
Ion implantation apparatus and control method thereof
SEN CORP11 citations80
US7755067B2Jul 13, 2010
Ion implantation apparatus and method of converging/shaping ion beam used therefor
SEN CORP6 citations61
US9117627B2Aug 25, 2015
Ion implantation apparatus and ion implantation method
SEN CORP0 citations46
SEN CORP AN SHI & AXCELIS CO
3 patentsUS7982192B2Jul 19, 2011
Beam processing apparatus
SEN CORP AN SHI & AXCELIS CO6 citations61
US7851772B2Dec 14, 2010
Ion implantation apparatus and ion implantation method
SEN CORP AN SHI & AXCELIS CO6 citations61
US7411709B2Aug 12, 2008
Beam processing system and beam processing method
SEN CORP AN SHI & AXCELIS CO0 citations35